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发明名称
PROBE CARD
摘要
申请公布号
JPH03122570(A)
申请公布日期
1991.05.24
申请号
JP19890261420
申请日期
1989.10.05
申请人
TAKEDA SANGYO KK
发明人
TOMOKAGE HAJIME
分类号
G01R1/073;H01L21/66
主分类号
G01R1/073
代理机构
代理人
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