FORMATION OF MULTILAYER INTERCONNECTION,申请号JP19890261840-传众专利搜索

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发明名称	FORMATION OF MULTILAYER INTERCONNECTION
摘要
申请公布号	JPH03123032(A)	申请公布日期	1991.05.24
申请号	JP19890261840	申请日期	1989.10.05
申请人	SONY CORP	发明人	SATO JUNICHI
分类号	H01L21/3205;H01L21/768;H01L23/522	主分类号	H01L21/3205
代理机构		代理人
主权项
地址

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