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发明名称
PLASMA DEVICE
摘要
申请公布号
JPH03122996(A)
申请公布日期
1991.05.24
申请号
JP19890259517
申请日期
1989.10.04
申请人
SUMITOMO METAL IND LTD
发明人
KOMACHI KYOICHI
分类号
H05H1/02;H01L21/203;H01L21/205;H05H1/18
主分类号
H05H1/02
代理机构
代理人
主权项
地址
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