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发明名称
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摘要
申请公布号
JPH03123048(A)
申请公布日期
1991.05.24
申请号
JP19890260477
申请日期
1989.10.04
申请人
NEC KYUSHU LTD
发明人
SUETSUGU TOSHIYUKI
分类号
G01R31/26;G01R31/00;H01L21/66
主分类号
G01R31/26
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代理人
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