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发明名称
DEVICE FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03123024(A)
申请公布日期
1991.05.24
申请号
JP19890260475
申请日期
1989.10.04
申请人
NEC KYUSHU LTD
发明人
YOSHINAGA JUNICHI
分类号
H01L21/205;H01L21/285;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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