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发明名称
DETECTING DEVICE FOR DEFORMATION OF MIRROR SURFACE
摘要
申请公布号
JPH03122508(A)
申请公布日期
1991.05.24
申请号
JP19890259910
申请日期
1989.10.06
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
SHIMIZU MASAFUMI;KAWAKAMI YOICHI
分类号
G01B11/24;G01C3/00
主分类号
G01B11/24
代理机构
代理人
主权项
地址
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