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发明名称
CLEANING DEVICE FOR UPPER FACE OF SUCTION CHUCKING MECHANISM IN SEMICONDUCTOR WAFER GRINDER
摘要
申请公布号
JPH03121778(A)
申请公布日期
1991.05.23
申请号
JP19890257140
申请日期
1989.10.03
申请人
SHIBAYAMA KIKAI KK
发明人
KOBAYASHI KAZUO
分类号
B08B1/04;B24B55/00;B24B55/02;H01L21/304
主分类号
B08B1/04
代理机构
代理人
主权项
地址
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