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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03120841(A)
申请公布日期
1991.05.23
申请号
JP19890260445
申请日期
1989.10.04
申请人
NEC CORP
发明人
UEDA KAZUYOSHI
分类号
H01L29/812;H01L21/304;H01L21/338;H01L29/41
主分类号
H01L29/812
代理机构
代理人
主权项
地址
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