| 摘要 |
PURPOSE:To prevent the damage of products in process on a manufacturing device, which is due to the sudden interruption of an upper rank power source device, by a method wherein the overall current of a system is measured to restrain the overall current within a set current by an interlock means. CONSTITUTION:An upper rank power source throwing device 1 is thrown, then, a breaker 2a is thrown. A current is measured by a current meter 11 and the value of current is compared with the value of a set current in a current comparing circuit 5 and when the value of current is within the value of the set current, a oil 9 is conducted by the power source 10. A relay 7a is closed, a coil 6a is excited, another relay 8a is closed and the self-retension of a circuit is effected. When a breaker 2b is thrown and a current is within a specified value, the power source 10 is thrown into a semiconductor manufacturing device 4c. When said value of current has become larger than the specified value, the coil 9, closing first relays 7a, 7b, 7c, is not conducted and the power source 10 can not be thrown into the semiconductor manufacturing device 4c. According to this method, the damage of products in process may be prevented. |
