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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03116784(A)
申请公布日期
1991.05.17
申请号
JP19890254261
申请日期
1989.09.28
申请人
NEC CORP
发明人
HAMADA HIROYUKI
分类号
H01L29/78;H01L21/336;H01L29/41;H01L29/417
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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