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发明名称
VACUUM APPARATUS
摘要
申请公布号
JPH03116713(A)
申请公布日期
1991.05.17
申请号
JP19900164340
申请日期
1990.06.25
申请人
PHILIPS GLOEILAMPENFAB:NV
发明人
UIREMU FUREDORITSUKU MERINKU;PETERU YOHANESU HERUTORUDEISU MARIA YANSEN;YAN TSUUIIRU;HARUMU ROTSUTERUMAN
分类号
H01J37/16;H01J37/18;H01L21/00;H01L21/02
主分类号
H01J37/16
代理机构
代理人
主权项
地址
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