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发明名称
ELECTRON BEAM EXPOSURE
摘要
申请公布号
JPH03116922(A)
申请公布日期
1991.05.17
申请号
JP19890255868
申请日期
1989.09.29
申请人
FUJITSU LTD
发明人
KAI JUNICHI
分类号
H01L21/00;H01L21/027
主分类号
H01L21/00
代理机构
代理人
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