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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03116829(A)
申请公布日期
1991.05.17
申请号
JP19890251900
申请日期
1989.09.29
申请人
HITACHI LTD
发明人
UDA HIDE;OWADA NOBUO
分类号
H01L21/265
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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