MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19890254155-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH03116734(A)	申请公布日期	1991.05.17
申请号	JP19890254155	申请日期	1989.09.28
申请人	NEC YAMAGATA LTD	发明人	KIMURA MITSUHIKO
分类号	H01L21/302;H01L21/3205;H01L21/3213	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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