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发明名称
MANUFACTURE OF SINGLE CRYSTAL SEMICONDUCTOR THIN FILM
摘要
申请公布号
JPH03116924(A)
申请公布日期
1991.05.17
申请号
JP19890256142
申请日期
1989.09.29
申请人
KYOCERA CORP
发明人
TANAKA KIYONARI;NITTA YOSHITERU;YAMAGUCHI NORITOSHI;TOMITA KENJI
分类号
H01L21/20;H01L21/263
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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