| 摘要 |
PURPOSE:To improve the working accuracy of a sample by previously setting the numerical values, such as max. and min. values, to measure the change in the laser beam mode and emitting an alarm as an abnormal value when the value deviates from the set values. CONSTITUTION:A data analyzing means 8 previously sets the numbers of the max. values and min. values of the laser beam mode and the distances between the max. values and the min. values or the values of the max. value-min. value by a personal computer, etc., compares the actual values and the magnitude thereof and outputs the alarm in the event of the abnormality. The operations, such as surface treatment, of the sample 6 can be eventually continued as it is if the numbers of the max. values and the min. values are within the range of the upper and lower limit set values of the laser beam mode. Even a slight change in the mode is detected in this way. |
