发明名称 VAPOR DEPOSTION PROCESS FOR DEPOSITING AN ORGANO-METALLIC COMPOUND LAYER ON A SUBSTRATE
摘要 <p>The invention comprises applying to a substrate a precursor of an organo-metallic compound, the precursor preferably consists of one or more pairs of ligand substituted Group III and V elements. The precursor is decomposed and deposits onto a receiving layer held at the decomposing temperature of the vaporized material.</p>
申请公布号 WO1991006688(A1) 申请公布日期 1991.05.16
申请号 US1990006051 申请日期 1990.10.22
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