发明名称 WIRE BONDING METHOD
摘要 PURPOSE:To enable discharge under the same condition before and after the exchange of a capillary, and stabilize the diameter of a ball to be formed, by determining the optimum position of the capillary at the time of discharge, on the basis of the contact position or the relative movement amount of the capillary and a setting member. CONSTITUTION:After a capillary 25 is mounted on an arm 23 positioned at the origin, a torch electrode 26 is moved on the moving locus of the capillary 25. The capillary 25 begins to descend toward the torch electrode 26 by the command from a controlling equipment 29. When the capillary 25 comes into contact with the torch electrode 26, it is detected by a contact detector 28. From this detection signal, the value (b) of the moving amount from the origin position to the point where the capillary 25 comes into contact with the torch electrode 26 can be detected. The controlling equipment 29 delivers the value (b) and the optimum distance (a) for discharge previously stored in a storing part 31 to an operating part 32, which calculates the difference (c). In a process that discharge is generated between a wire and the torch electrode 26, the position of the capillary 25 is set to be a position lower by the value (c) than the origin position. In this state the discharge is generated, thereby forming a ball at the wire tip.
申请公布号 JPH03114240(A) 申请公布日期 1991.05.15
申请号 JP19890252640 申请日期 1989.09.28
申请人 TOSHIBA SEIKI KK 发明人 MIURA HIROSHI
分类号 H01L21/60 主分类号 H01L21/60
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