Method of providing aluminium or aluminium alloy tracks on a substrate.

摘要

When aluminium tracks are provided on a substrate by first providing on a substrate a layer of aluminium, and then removing this layer in a certain pattern by plasma etching in a chlorine-containing atmosphere, it is found that chlorine residues remaining on the substrate promote corrosion of the aluminium tracks. Rinsing in water turns out to remove these chlorine residues insufficiently. If immediately after plasma etching in a chlorine-containing atmosphere the product obtained is exposed to a plasma in a nitrogen-containing atmosphere, chlorine residues can subsequently be removed by rinsing with water, which is found to improve effectively the corrosion assistance of the aluminium tracks.