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发明名称
METHOD FOR MOLECULAR-BEAM EPITAXIAL GROWTH
摘要
申请公布号
JPH03112889(A)
申请公布日期
1991.05.14
申请号
JP19890249017
申请日期
1989.09.27
申请人
FUJITSU LTD
发明人
YOSHIDA AKIRA
分类号
C30B23/08;C30B29/22;H01L21/203
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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