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发明名称
APPARATUS FOR LIQUID-PHASE EPITAXIAL GROWTH
摘要
申请公布号
JPH03112887(A)
申请公布日期
1991.05.14
申请号
JP19890248640
申请日期
1989.09.25
申请人
SUMITOMO ELECTRIC IND LTD
发明人
MATSUMOTO KAZUHISA
分类号
C30B19/00;H01L21/208
主分类号
C30B19/00
代理机构
代理人
主权项
地址
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