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发明名称
METHOD FOR SENSING CRYSTAL DYING IN PULLING UP SINGLE CRYSTAL
摘要
申请公布号
JPH03112885(A)
申请公布日期
1991.05.14
申请号
JP19890248100
申请日期
1989.09.26
申请人
KAWASAKI STEEL CORP
发明人
MARUYAMA SATOSHI
分类号
C30B15/26;H01L21/208
主分类号
C30B15/26
代理机构
代理人
主权项
地址
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