发明名称 |
Process for forming a fine resist pattern |
摘要 |
A process for forming a fine resist pattern which comprises forming an organic thin film by coating a substrate with a resist comprising, as a base polymer, a polymer to which there is chemically bonded a functional group which is converted into amino group or sulfonic acid group responding to a first energy beam; forming a surface exposed patterned layer at the vicinity of the surface of the organic thin film by selectively exposing said surface to said first energy beam; selectively staining said surface exposed patterned layer with a substance which absorbs a second energy beam; exposing the entire surface of said organic thin film to said second energy beam and forming a resist pattern by developing the organic thin film exposed to said second energy beam. According to the process of the present invention, a fine resist pattern of a high resolution can be obtained using an exposure apparatus of a shallow focal depth without largely improving the conventional resist process technology.
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申请公布号 |
US5015559(A) |
申请公布日期 |
1991.05.14 |
申请号 |
US19890379864 |
申请日期 |
1989.07.14 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
OGAWA, KAZUFUMI |
分类号 |
G03F7/095;G03F7/039;G03F7/20;G03F7/26;G03F7/38;H01L21/027;H01L21/30 |
主分类号 |
G03F7/095 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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