PRODUCTION OF CERAMIC FORM AND RAW MATERIAL FORM FOR PRODUCTION THEREOF

摘要

PURPOSE:To provide the title production method by CVD technique. so designed that a groove is provided so as to surround the joint between a raw material form and a support to mitigate the residual stress in a laminated ceramic film leading to prevention of the crack propagation therein. CONSTITUTION:A groove 16 is provided on a raw material form 10 so as to surround the joint between a support 12 and the raw material form 10. This raw material form 10 is then heated in a reaction furnace to laminate the raw material form 10 with a ceramic by CVD technique. Thence, the resulting ceramic film 18 laminated is separated from the raw material form 10, thus obtaining the objective ceramic form consisting of the ceramic film 18.