| 摘要 |
PURPOSE:To reduce variation of an observation result in the incidence direction of an electromagnetic wave or flying particulates by arranging a radiation detection part on a slanting support surface formed atop of a substrate. CONSTITUTION:The detection output signal of the radiation detection part 1a provided on the package substrate 4 is processed by a signal processing circuit 5a. At this time, a support block 2a is fixed atop of the substrate 4 and the detection part 1a is held slantingly. Then indivdual detectors are arrayed, fixed, and assembled while slid by a pitch P in the height direction and by a distance S laterally corresponding to the length and tilt angle of an unwinding part 1a, thereby obtaining a two-dimensional radiation detector. Thus, the respective detection parts 1a can be mounted almost on the same plane.
|
