| 摘要 |
PURPOSE:To form a groove which is very deep, narrow in width, and steep on side faces by repeating processes to form grooves with the same pattern at the same positions on films multiple times. CONSTITUTION:Multiple row electrodes 10 are formed in parallel on an insulating substrate 8 to cross column electrodes 2, and an insulating layer 7 is formed on electrodes 10. A dry film 11 is stuck on the layer 7. Grooves 12 of the negative pattern of a spacer are formed on the film 11. A dry film 11 is further stuck on the film 11 formed with grooves 12. Grooves with the same pattern as for the previously formed grooves 12 are formed at the same positions on the film 11. The above processes are repeated as required. The material of a spacer 5, dielectric paste, is filled in grooves 12. It is dried together with the substrate 8. Finally, films 11 are removed, it is baked, and the spacer 5 is completed. |
