CONVEYOR FOR SEMICONDUCTOR DEVICE,申请号JP19890250876-传众专利搜索

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发明名称	CONVEYOR FOR SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH03112144(A)	申请公布日期	1991.05.13
申请号	JP19890250876	申请日期	1989.09.27
申请人	MITSUBISHI ELECTRIC CORP	发明人	SENBA SHINJI
分类号	G01R31/26;H01L21/66	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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