| 摘要 |
PURPOSE:To carry an object accurately along a carrying path by providing the object having a plurality of secondary movers arranged with slider teeth in different directions, and a carrying face having a plurality of primary stators arranged in matrix and provided with stator teeth in different directions. CONSTITUTION:An object 3 to be carried is provided with a plurality of slider teeth 31a, secondary movers 31 of a linear motor are arranged in matrix, and a driven unit 32 arranged with adjacent secondary movers 31 with the slider teeth 31a thereof crossing perpendicularly is mounted on the bottom face. Further, a bearing 33 for carrying the slider teeth 31a while maintaining a predetermined gap with respect to the stator teeth 11a of the primary stator 11 is provided. By such arrangement, the object 3 can be carried accurately along carrying paths 2a, 2b, 2c. |
