| 摘要 |
PURPOSE:To perform precise control of three-dimensional micro displacement through simple operation over a wide operating range by making slits in the axial direction at the borders of respective individual electrodes thereby splitting a piezoelectric element. CONSTITUTION:Individual electrodes 2a-2d are splitted into four sections in the axial direction of a cylindrical piezoelectric element 1. Four slits 5, corresponding to the four sections of the electrodes 2a-2d, are made in the axial direction in the piezoelectric element 1 at the boarders of the electrodes 2a-2d. The piezoelectric element 1 is splitted by the four slits 5 into four sections, and the individual electrodes 2a-2d are formed at respective sections. By such arrangement, influence of displacement (distorsion) at one individual electrode section onto adjacent individual electrode sections is suppressed remarkably and thereby complex displacement due to interference of displacement at the border can be avoided. |
