| 摘要 |
PURPOSE:To reduce the number of patterns to be stored in advance by matching the position of a pattern to be inspected with the position of a reference pattern, generating a fault candidate pattern by logical arithmetic, and detecting the fault of the pattern to be inspected by the logical arithmetic of the fault candidate pattern and a mask pattern. CONSTITUTION:When a pattern to be inspected is inputted by an image pickup device, an exclusive OR circuit 9 executes the arithmetic with a reference pattern 2 to obtain a fault candidate pattern 10. At such a time, the thickness of the pattern 1 to be inspected and the reference pattern 2 is almost same mutually and the positions are correctly matched. In an AND circuit 11, the arithmetic of the fault candidate pattern 10 and a mask pattern 8 is executed to obtain a result pattern 12 and a lacking fault 12a and an added fault 12b are detected. |
