| 摘要 |
PURPOSE:To provide a hybrid integrated circuit of good quality by arranging a nozzle for blowing air to a portion where a substance is sublimed by a laser beam and another nozzle for drawing air ejected from the blowing nozzle. CONSTITUTION:A blowing nozzle 32 is provided on a border of a substrate 12. The nozzle is adapted to blow air to a portion where a substance is sublimed by a laser beam 26. A suction nozzle 34 for drawing air ejected from the nozzle 26 is provided on the opposite side of the substrate 12. When a thick-film integrated circuit 22 is irradiated with a laser beam, the sublimate is blown by the nozzle 32 and sucked together with air by the nozzle 34. A resistor is trimmed by laser in this manner. |
