| 摘要 |
PURPOSE:To prevent the thermal deformation of a work holding panel and work with the heating by a contact resistance, by providing a magnetic means which bonds a spherical part magnetically in a noncontact state with a receiving part on this spherical part. CONSTITUTION:When a driving shaft 25 and polishing surface plate 13 are rotated by operating a driving motor 28, a tommy bar 16 is also rotated together with this driving shaft 25. When this tommy bar 16 is rotated, the coil 22 of each projection body 18 is fed, a work holding panel 11 is also rotated together with a receiving member 14 via the receiving part 15 bonded with the spherical part 17 of the tommy bar 16 magnetically with the excitation of these exciting parts 19 and the face brought into contact with the polishing surface plate 13 of a work 12 is polished. In this case, the receiving member 14 formed with the receiving part 15 becomes to perform a back rotation in a noncontact state with the spherical part 17, so the heating by the contact resistance can not be generated among those. Consequently, the working holding panel 11 fixed with joining to the receiving member 14 and the work 12 sticked thereto are not deformed thermally and the working accuracy is not reduced. |
