| 摘要 |
PURPOSE:To prevent improper operation when storing and taking out a glass substrate by controlling information on the glass substrate by using a computer and by providing a reading device of an identification symbol on the glass substrate. CONSTITUTION:A substrate R is positioned and placed on a fork 56 by operation of a nib-part material 655. After that, the substrate R is fed to a foreign object inspection device 6 and a reader device 7 in sequence by driving each motor on the library side, and a specified inspection and check are performed. Then, the substrate R is stored into a dust-proof cassette case 11 which is specified by a computer 9. Since the computer 9 reads an identifier such as a bar code which is added to the surface of the dust-proof cassette case 11 by using an identifying device 91, it is possible to control the relationship between the substrate R which is stored inside and the name, thus achieving storage/take-out of the glass substrate without any improper operation. |
