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发明名称
MANUFACTURE OF SINGLE CRYSTALLINE SEMICONDUCTOR THIN FILM
摘要
申请公布号
JPH03109718(A)
申请公布日期
1991.05.09
申请号
JP19890248467
申请日期
1989.09.25
申请人
KYOCERA CORP
发明人
YAMAGUCHI NORITOSHI;NITTA YOSHITERU;TANAKA KIYONARI;TOMITA KENJI
分类号
H01L21/20;H01L21/268
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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