| 摘要 |
<p>PURPOSE:To uniformize quality by supporting plural base materials on a drum- shaped base material supporting base installed in an applicator which can charge microwaves from plural directions and rotating the base in a specific direction, thereby exposing the base materials uniformly to a plasma atmosphere. CONSTITUTION:After the inside of a quartz tube 2 is evacuated to a reduced pressure, a gaseous mixture composed of H2 and hydrocarbon is introduced from a gas introducing port 9 into the quartz tube. Microwaves are charged from both directions into an applicator 2 to convert the gaseous mixture in the quartz tube 2 to the plasma. The rotating speed of the drum-shaped base material supporting base 5 which is so constituted as to support the plural base materials 12 in radial arrangement and to rotate around the shaft perpendicular to the discharge direction of the plasma is adjusted and the base materials are maintained at a prescribed temp. by cooling a section 6 for mounting the base material supporting base with water, by which the base materials 12 are exposed uniformly to the plasma atmosphere for a long period of time. The diamond coating which is free from fluctuation in quality is thereby obtd.</p> |
