TEMPERATURE SENSOR

摘要

Temperature Sensor A temperature sensor comprises a Fabry-Perot cavity formed between one end of a sinyle mode fiber and the surface of a silicon reflector. The Reflector is formed as one sidewall of a channel in a block of silicon, the other sidewall of the channel being of lesser height from the base of the channel. A groove formed in the top of the other sidewall of the channel provides an anchorage for the end of the fiber. Modulated light from a laser is propagated down the fiber and changes of temperature alter the optical path length of the cavity. The light reflected in the fiber will form interference fringes which are detected and used to determine the temperature changes.