| 摘要 |
PURPOSE:To perform efficient positioning operation with small vibration when a stage is stopped by providing a control driving device for accelerating a balance member which is movable in the direction of centroid movement of the stage in the direction opposite to the movement of the stage and for stopping it at the same time with the stage. CONSTITUTION:A motor 12 and a bearing member 16 are fixed on a base 3, and a ball screw 13 connected to a driving axis of the motor 12 is engaged with a female screw 14 of a stage 6. A control device 11 controls the stage 6 by operating the motor 12 according to a predetermined program. In the mean time, a feed screw 8 connected to the driving axis of a motor 9 fixed on the base 3 is engaged with a female screw of a weight 7 which is a balance member. Also, a vibration proofing control device 10 calculates a driving condition of the weight 7 based on a signal according to a driving condition of the stage 6 from a control device 11 so as to operate the motor 9. Thus, the balance member generates another reaction force to deny the reaction force given to the base by the stage so as to reduce amplitude of vibration generated when the stage is stopped and time for positioning. |
