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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03108755(A)
申请公布日期
1991.05.08
申请号
JP19890247163
申请日期
1989.09.22
申请人
MITSUBISHI ELECTRIC CORP
发明人
IKEGAMI MASAAKI
分类号
H01L27/04;H01L21/822;H01L21/8222;H01L27/06
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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