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发明名称
摘要
申请公布号
JPH0331673(B2)
申请公布日期
1991.05.08
申请号
JP19850225772
申请日期
1985.10.09
申请人
MITSUBISHI MATERIARU KK;NIPPON SHIRIKON KK
发明人
KONNO SHOICHI
分类号
C30B15/00;C30B15/20;H01L21/18;H01L21/208
主分类号
C30B15/00
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