Work-table for semiconductor processing clean room - controls air flow vertically on to table to prevent air turbulence

摘要

The work surface (16) of the table (10) is provided with holes (14) which go through to underside of work surface (16) to link with channels (20) which further connect to extractor channels (24) located near the floor. An airflow (25) is then directed perpendicular to work surfaces (16) through channels (20,24) to avoid turbulence or cross flow of air. Pref., the table (10) includes a recess (42) for operators legs. USE - Clean room environment esp. semi-conductor wafer processing.