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发明名称
METHOD OF FORMING SOI THIN FILM
摘要
申请公布号
JPH03108317(A)
申请公布日期
1991.05.08
申请号
JP19890245414
申请日期
1989.09.21
申请人
NEC CORP
发明人
MOGAMI TORU
分类号
H01L21/20;H01L21/203;H01L21/324;H01L21/336;H01L27/12;H01L29/78;H01L29/786
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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