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发明名称
INTERFEROMETER VARIABLER EMPFINDLICHKEIT ZUR KONTROLLE VON EBENHEITSFEHLERN AN FLAECHEN
摘要
申请公布号
DD289666(A7)
申请公布日期
1991.05.08
申请号
DD19870306224
申请日期
1987.08.21
申请人
VNIIMS,SU
发明人
SERGIN,ALEKSANDR G.,SU;DUCHOPEL,IVAN I.,SU;LOGACEVA,LIDIJA N.,SU;MARTYNOVA,VALENTINA B.,SU;PROCHOROVA,NATALJA A.,SU
分类号
G01B9/02;(IPC1-7):G01B9/02
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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