Semiconductor pressing force sensor.

摘要

A semiconductor pressing force sensor comprising a diaphragm formed of a semiconductor single-crystal base, a thin film portion formed centrally in the diaphragm, a bridge circuit consisting of a plurality of gauge resistances formed on a first surface of the thin film portion, and a contactor operative to transmit the force to be measured onto a second surface of the thin film portion, whereby a force is directly measured without presence of fluid being required.