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发明名称
DRY ETCHING EQUIPMENT
摘要
申请公布号
JPH03107479(A)
申请公布日期
1991.05.07
申请号
JP19890247231
申请日期
1989.09.22
申请人
NEC CORP
发明人
MOGAMI TORU
分类号
C23F4/00;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
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地址
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