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发明名称
PLASMA TREATING DEVICE
摘要
申请公布号
JPH03107480(A)
申请公布日期
1991.05.07
申请号
JP19890242269
申请日期
1989.09.20
申请人
HITACHI LTD;HITACHI KASADO ENG KK
发明人
KATO SHIGEKAZU;TAMURA NAOYUKI;NISHIHATA KOJI;ITO ATSUSHI;TSUBONE TSUNEHIKO
分类号
C23C16/50;C23C16/511;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;H05H1/46
主分类号
C23C16/50
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代理人
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