| 摘要 |
PURPOSE:To obtain an ultrathin film electrode of uniform thickness with excellent productivity by mixing in a gas another gas that reacts with metal vapor, so as to produce active substance. CONSTITUTION:In an evaporation chamber 1, metal manganese is put in a crucible 2 and is heated and melted by a high-frequency induction heater 3 and evaporated so that atomized metal manganese is formed. The atomized manganese dioxide is sprayed onto stainless foil in a deposition chamber 6 by means of a gas flow using a nozzle 5. Thus a coating layer is formed and a firm accumulated body is formed on the base 8 of stainless foil by injection and accumulation of manganese dioxide; an ultrathin film electrode of uniform thickness is thereby formed with excellent productivity. |
