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发明名称
FORMING METHOD OF METALLIC WIRING
摘要
申请公布号
JPH03105921(A)
申请公布日期
1991.05.02
申请号
JP19890244565
申请日期
1989.09.19
申请人
SHARP CORP
发明人
TAKENAKA NOBUYUKI
分类号
H01L21/3213;H01L21/3205
主分类号
H01L21/3213
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