| 摘要 |
<p>PURPOSE:To convey a wafer by using an ordinary wafer holder irrespective of a positional relationship between a vacuum chamber and a conveyance chamber by a method wherein a holder support part is equipped with a mechanism which is turned by making use of a horizontal movement direction as an axis. CONSTITUTION:By means of a rotary mechanism 7, which is composed of a combination of bevel gears, of a wafer conveyance apparatus 8, holder support parts 3 fixed to a shaft 17 can be turned by making use of a conveyance direction, i.e., a direction of a nearly parallel rail 4, as an axis. The gears of the rotary mechanism 7 are constituted in such a way that a torque is transmitted from the outside of a conveyance chamber 16 by means of a rotation introduction apparatus 71 which has been attached to the conveyance chamber 16 perpendicularly to a direction of the nearly parallel rail 4. Consequently, even when vacuum chambers 9 and 10 are arranged on opposite sides at distances from the conveyance chamber 16, a wafer can be delivered by means of respective transfer rods 13 for vacuum chamber use when the rotation introduction apparatus 71 is installed between both vacuum chambers and a direction of wafer holders 2 is changed to a desired direction during a conveyance operation.</p> |
