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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03106056(A)
申请公布日期
1991.05.02
申请号
JP19890244045
申请日期
1989.09.20
申请人
FUJITSU LTD
发明人
DEGUCHI TATSUYA;INAYOSHI KATSUYUKI
分类号
H01L21/768;H01L23/522
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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