| 摘要 |
PURPOSE:To make efficiently a selection of defectives by a method wherein the formation of a substrate to correspond to an identification sign provided in each section on a metallic substrate is performed and the identification sign of a defective individual integrated circuit is erased in an inspection of the functions of circuits. CONSTITUTION:At the time of screen printing of conductive paterns 15, an individual identification sign 14 to correspond to each pattern 15 is printed at the corner part of each section 13. A current is made to flow through each pattern 15 and an inspection of the functions of circuits is carried out including a semiconductor element 17 and other circuit elements. When the element 17 does not fulfill the prescribed functions of circuits, the element 17 is removed to perform a regeneration and the improvement of an yield is contrived. The inspection of the functions of circuits is carried out and the identification sign 14 of an individual integrated circuit identified as a defective is painted out with a light-shielding material 18, such as a black resist or the like, and the sign 14 is erased. After that, the circuit is individually separated from a substrate 11, an individual substrate with the erased sign 14 is removed as a defective and other individual substrates are selected in every same type of machine according to the signs 14. Thereby, defectives can efficiently be sorted out. |
